Book Title: ULSI Semiconductor Technology Atlas
By: Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu
Book Type: PDF
File Size: 26 MB
eBook Title: ULSI Semiconductor Technology Atlas Free download pdf ebook
About the book:
More than 1,100 TEM images illustrate the science of ULSI
The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems.